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Proceedings Paper

Development of piezoelectric adaptive mirror for hard x-ray nanofocusing
Author(s): S. Matsuyama; T. Kimura; H. Nakamori; S. Imai; Y. Sano; Y. Kohmura; K. Tamasaku; M. Yabashi; T. Ishikawa; K. Yamauchi
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Paper Abstract

To construct an adaptive X-ray focusing optical system, we developed an ultraprecise deformable mirror that consists of a substrate, piezoelectric actuators, and 18 electrodes. A one-dimensional focusing test was performed at SPring-8 at 15 keV. The mirror deformation was roughly adjusted by applying voltages determined by a deformation test with a Fizeau interferometer. The shape was then finely corrected based on the shape determined by the pencil-beam method and the phase retrieval method. A focused beam with a full width at half maximum of 120 nm was obtained.

Paper Details

Date Published: 15 October 2012
PDF: 8 pages
Proc. SPIE 8503, Adaptive X-Ray Optics II, 850303 (15 October 2012); doi: 10.1117/12.930276
Show Author Affiliations
S. Matsuyama, Osaka Univ. (Japan)
T. Kimura, Hokkaido Univ. (Japan)
H. Nakamori, Osaka Univ. (Japan)
S. Imai, Osaka Univ. (Japan)
Y. Sano, Osaka Univ. (Japan)
Y. Kohmura, RIKEN (Japan)
K. Tamasaku, RIKEN (Japan)
M. Yabashi, RIKEN (Japan)
T. Ishikawa, RIKEN (Japan)
K. Yamauchi, Osaka Univ. (Japan)
CREST, JST (Japan)


Published in SPIE Proceedings Vol. 8503:
Adaptive X-Ray Optics II
Ali M. Khounsary; Stephen L. O'Dell; Thomas G. Bifano, Editor(s)

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