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Proceedings Paper

Non-destructive 3D characterization of microchannels
Author(s): Ville Heikkinen; Anton Nolvi; Ivan Kassamakov; Kestutis Grigoras; Sami Franssila; Edward Hæggström
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Paper Abstract

Microfluidic devices allow experimentation in smaller space using small amounts of liquid, resulting in improved reaction rates, cheaper equipment, reduced amount of expensive reagents. Very precise channel shape measurements are needed to assure the designed flow pattern. Several 3D imaging devices provide the necessary precision but typically they cannot image inside closed devices. Hence it is difficult to measure the shape of a microfluidic channel without destroying it. We fabricated and investigated samples with different microchannels. Several types of microfluidic channels were prepared in silicon wafer with a subsequent covering by bonding glass wafer on top. Microchannels in polymer have been done using epoxy-type photoresist SU-8. The internal geometry of the channels was measured using a Scanning White Light Interferometer (SWLI) equipped with optics that compensates for the effects of the top glass of the channels. The geometry of the interior of the channels can be measured with a precision similar to surface layer SWLI measurements without destroying the channels.

Paper Details

Date Published: 25 October 2012
PDF: 7 pages
Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 84660R (25 October 2012); doi: 10.1117/12.930080
Show Author Affiliations
Ville Heikkinen, Univ. of Helsinki (Finland)
Anton Nolvi, Univ. of Helsinki (Finland)
Ivan Kassamakov, Univ. of Helsinki (Finland)
Kestutis Grigoras, VTT Technical Research Ctr. of Finland (Finland)
Sami Franssila, Aalto Univ. (Finland)
Edward Hæggström, Univ. of Helsinki (Finland)


Published in SPIE Proceedings Vol. 8466:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
Michael T. Postek; Victoria A. Coleman; Ndubuisi G. Orji, Editor(s)

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