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Proceedings Paper

Inductively coupled plasma etching for delineation of InAs/GaSb pixels
Author(s): Jean Nguyen; John Gill; Sir B. Rafol; Alexander Soibel; Arezou Khoshakhlagh; David Ting; Sam Keo; Anita Fisher; Edward Luong; John Liu; Jason Mumolo; Sarath D. Gunapala
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Paper Abstract

We developed 320x256 Complimentary Barrier Infrared (CBIRD) focal plane array (FPA) for long wave infrared (LWIR) imaging application. The FPA layers grown by molecular beam epitaxy (MBE) had 300 periods 1.9 μm thick absorber. The CBIRD arrays showed the mean dark current density of 2.2 x 10-4 A/cm2, when 128 mV bias voltage was applied. The long wave cut off was observed at 8.8 μm at the 50 % peak and the maximum quantum efficiency was 54 % at 5.6 μm. The arrays had 81 % fill factor with 97 % operability with noise equivalent difference temperature (NEΔT) of 18.6 mK and a mean detectivity of D*=1.3 x 1011 Hz1/2/W.

Paper Details

Date Published: 24 October 2012
PDF: 9 pages
Proc. SPIE 8511, Infrared Remote Sensing and Instrumentation XX, 851103 (24 October 2012); doi: 10.1117/12.930046
Show Author Affiliations
Jean Nguyen, Jet Propulsion Lab. (United States)
John Gill, Jet Propulsion Lab. (United States)
Sir B. Rafol, Jet Propulsion Lab. (United States)
Alexander Soibel, Jet Propulsion Lab. (United States)
Arezou Khoshakhlagh, Jet Propulsion Lab. (United States)
David Ting, Jet Propulsion Lab. (United States)
Sam Keo, Jet Propulsion Lab. (United States)
Anita Fisher, Jet Propulsion Lab. (United States)
Edward Luong, Jet Propulsion Lab. (United States)
John Liu, Jet Propulsion Lab. (United States)
Jason Mumolo, Jet Propulsion Lab. (United States)
Sarath D. Gunapala, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 8511:
Infrared Remote Sensing and Instrumentation XX
Marija Strojnik; Gonzalo Paez, Editor(s)

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