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Proceedings Paper

Methodology for optimal in situ alignment and setting of bendable optics for diffraction-limited focusing of soft x-rays
Author(s): Daniel J. Merthe; Valeriy V. Yashchuk; Kenneth A. Goldberg; Martin Kunz; Nobumichi Tamura; Wayne R. McKinney; Nikolay A. Artemiev; Richard S. Celestre; Gregory Y. Morrison; Erik Anderson; Brian V. Smith; Edward E. Domning; Senajith B. Rekawa; Howard A. Padmore
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Paper Abstract

We demonstrate a comprehensive and broadly applicable methodology for the optimal in situ configuration of bendable soft x-ray Kirkpatrick-Baez mirrors. The mirrors used for this application are preset at the ALS Optical Metrology Laboratory prior to beamline installation. The in situ methodology consists of a new technique for simultaneously setting the height and pitch angle of each mirror. The benders of both mirrors were then optimally tuned in order to minimize ray aberrations to a level below the diffraction-limited beam waist size of 200 nm (horizontal) × 100 nm (vertical). After applying this methodology, we measured a beam waist size of 290 nm (horizontal) × 130 nm (vertical) with 1 nm light using the Foucault knife-edge test. We also discuss the utility of using a grating-based lateral shearing interferometer with quantitative wavefront feedback for further improvement of bendable optics.

Paper Details

Date Published: 15 October 2012
PDF: 16 pages
Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 850108 (15 October 2012); doi: 10.1117/12.930023
Show Author Affiliations
Daniel J. Merthe, Lawrence Berkeley National Lab. (United States)
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)
Kenneth A. Goldberg, Lawrence Berkeley National Lab. (United States)
Martin Kunz, Lawrence Berkeley National Lab. (United States)
Nobumichi Tamura, Lawrence Berkeley National Lab. (United States)
Wayne R. McKinney, Lawrence Berkeley National Lab. (United States)
Nikolay A. Artemiev, Lawrence Berkeley National Lab. (United States)
Richard S. Celestre, Lawrence Berkeley National Lab. (United States)
Gregory Y. Morrison, Lawrence Berkeley National Lab. (United States)
Erik Anderson, Lawrence Berkeley National Lab. (United States)
Brian V. Smith, Lawrence Berkeley National Lab. (United States)
Edward E. Domning, Lawrence Berkeley National Lab. (United States)
Senajith B. Rekawa, Lawrence Berkeley National Lab. (United States)
Howard A. Padmore, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 8501:
Advances in Metrology for X-Ray and EUV Optics IV
Lahsen Assoufid; Peter Z. Takacs; Anand Krishna Asundi, Editor(s)

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