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Proceedings Paper

Ytterbium-pulsed fiber laser percussion drilling silicon for emitter wrap through solar cells
Author(s): Yongguang Huang; Xiaoning Zhu; Hongliang Zhu
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Paper Abstract

Different sidewall characters of the silicon microholes drilled with fiber laser pulses at 1065.2 nm were examined by a scanning electron microscope. It shows two different recast phases on the hole-wall: mild melt phase with smooth interface and vaporization phase with rough interface. These two recast phases show different etch rate when alkaline texturing, which sometimes leave some undesirable damages on the sidewall. After alkaline texturing, the taper holes transform into octagonal holes. And the eight sidewalls of the octagonal-hole alternating appear two different micro-nano structures, one is pyramid structure, the other is lamellar structure.

Paper Details

Date Published: 12 October 2012
PDF: 6 pages
Proc. SPIE 8473, Laser Material Processing for Solar Energy, 84730T (12 October 2012); doi: 10.1117/12.929737
Show Author Affiliations
Yongguang Huang, Institute of Semiconductors, Chinese Academy of Science (China)
Xiaoning Zhu, Institute of Semiconductors, Chinese Academy of Science (China)
Hongliang Zhu, Institute of Semiconductors, Chinese Academy of Science (China)


Published in SPIE Proceedings Vol. 8473:
Laser Material Processing for Solar Energy
Edward W. Reutzel, Editor(s)

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