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Proceedings Paper

New reference material for transmission electron microscope calibration
Author(s): M. N. Filippov; V. P. Gavrilenko; M. V. Kovalchuk; V. B. Mityukhlyaev; A. V. Rakov; P. A. Todua; A. L. Vasiliev
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Paper Abstract

We propose a new type of reference material as a magnification standard of transmission electron microscope and a scanning transmission electron microscope. The reference material represents a thin cross-section of a silicon relief structure with certified sizes of its elements. It is fabricated using ion milling. Such reference material can be used for high microscope magnifications (by direct observation of the lattice), as well as for moderate magnifications (around 30,000 times).

Paper Details

Date Published: 11 October 2012
PDF: 7 pages
Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 84660D (11 October 2012); doi: 10.1117/12.929551
Show Author Affiliations
M. N. Filippov, JSC Ctr. for Surface and Vacuum Research (Russian Federation)
N.S. Kurnakov Institute of General and Inorganic Chemistry (Russian Federation)
Moscow Institute of Physics and Technology (Russian Federation)
V. P. Gavrilenko, JSC Ctr. for Surface and Vacuum Research (Russian Federation)
Moscow Institute of Physics and Technology (Russian Federation)
M. V. Kovalchuk, Russian Research Ctr. Kurchatov Institute (Russian Federation)
V. B. Mityukhlyaev, JSC Ctr. for Surface and Vacuum Research (Russian Federation)
A. V. Rakov, JSC Ctr. for Surface and Vacuum Research (Russian Federation)
P. A. Todua, JSC Ctr. for Surface and Vacuum Research (Russian Federation)
Moscow Institute of Physics and Technology (Russian Federation)
A. L. Vasiliev, Russian Research Ctr. Kurchatov Institute (Russian Federation)


Published in SPIE Proceedings Vol. 8466:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
Michael T. Postek; Victoria A. Coleman; Ndubuisi G. Orji, Editor(s)

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