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Proceedings Paper

Precision improving of double beam shadow moiré interferometer by phase shifting interferometry for the stress of flexible substrate
Author(s): Kuo-Ting Huang; Hsi-Chao Chen; Ssu-Fan Lin; Ke-Ming Lin; Hong-Ye Syue
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Paper Abstract

While tin-doped indium oxide (ITO) has been extensively applied in flexible electronics, the problem of the residual stress has many obstacles to overcome. This study investigated the residual stress of flexible electronics by the double beam shadow moiré interferometer, and focused on the precision improvement with phase shifting interferometry (PSI). According to the out-of-plane displacement equation, the theoretical error depends on the grating pitch and the angle between incident light and CCD. The angle error could be reduced to 0.03% by the angle shift of 10° as a result of the double beam interferometer was a symmetrical system. But the experimental error of the double beam moiré interferometer still reached to 2.2% by the noise of the vibration and interferograms. In order to improve the measurement precision, PSI was introduced to the double shadow moiré interferometer. Wavefront phase was reconstructed by the five interferograms with the Hariharan algorithm. The measurement results of standard cylinder indicating the error could be reduced from 2.2% to less than 1% with PSI. The deformation of flexible electronic could be reconstructed fast and calculated the residual stress with the Stoney correction formula. This shadow moiré interferometer with PSI could improve the precision of residual stress for flexible electronics.

Paper Details

Date Published: 13 September 2012
PDF: 8 pages
Proc. SPIE 8493, Interferometry XVI: Techniques and Analysis, 84931E (13 September 2012); doi: 10.1117/12.929509
Show Author Affiliations
Kuo-Ting Huang, National Yunlin Univ. of Science and Technology (Taiwan)
Hsi-Chao Chen, National Yunlin Univ. of Science and Technology (Taiwan)
Ssu-Fan Lin, National Yunlin Univ. of Science and Technology (Taiwan)
Ke-Ming Lin, National Yunlin Univ. of Science and Technology (Taiwan)
Hong-Ye Syue, National Yunlin Univ. of Science and Technology (Taiwan)


Published in SPIE Proceedings Vol. 8493:
Interferometry XVI: Techniques and Analysis
Joanna Schmit; Katherine Creath; Catherine E. Towers; Jan Burke, Editor(s)

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