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Proceedings Paper

Electrodes patterning on ionic polymer metal composite for making smooth surface on tunable mirrors
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Paper Abstract

Deformable mirror is a very important reflective component in optical system, which can vary the focal length while the surface deform. Nowadays several type of material were used as deformable mirror, such as liquid lens and MEMS deformable mirror. MEMS deformable mirror have been developed in our group and shows the potential. However, the problem of high actuation voltage is not easy to solve. In this thesis, we proposed using low voltage applied material, which is called Ioic-Polymer Metal Composite (IPMC) with the advantage of low applied voltage but high actuation performance. Arbitrary-shaped electrode IPMC was successfully fabricated by simply covering a shadow mask during electroless plating. Maximum central displacement of ellipsoid-shaped electrode IPMC can be achieved up to 350 μm under 2.5 volts applied. We believe this technique can be used in optical system as a deformable mirror in the future.

Paper Details

Date Published: 19 October 2012
PDF: 9 pages
Proc. SPIE 8489, Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II, 84890D (19 October 2012); doi: 10.1117/12.929384
Show Author Affiliations
Wei Cheng, National Taiwan Univ. (Taiwan)
Guo-Dung J. Su, National Taiwan Univ. (Taiwan)


Published in SPIE Proceedings Vol. 8489:
Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II
David H. Krevor; William S. Beich; Michael P. Schaub; Stefan M. Bäumer, Editor(s)

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