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Proceedings Paper

Development of a high-speed nanoprofiler using normal vector tracing
Author(s): T. Kitayama; H. Matsumura; K. Usuki; T. Kojima; J. Uchikoshi; Y. Higashi; K. Endo
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Paper Abstract

A new high-speed nanoprofiler was developed in this study. This profiler measures normal vectors and their coordinates on the surface of a specimen. Each normal vector and coordinate is determined by making the incident light path and the reflected light path coincident using 5-axis controlled stages. This is ensured by output signal of quadrant photo diode (QPD). From the acquired normal vectors and their coordinates, the three-dimensional shape is calculated by a reconstruction algorithm based on least-squares. In this study, a concave spherical mirror with a 400 mm radius of curvature was measured. As a result, a peak of 30 nm PV was observed at the center of the mirror. Measurement repeatability was 1 nm. In addition, cross-comparison with a Fizeau interferometer was implemented and the results were consistent within 10 nm. In particular, the high spatial frequency profile was highly consistent, and any differences were considered to be caused by systematic errors.

Paper Details

Date Published: 15 October 2012
PDF: 7 pages
Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 85010A (15 October 2012); doi: 10.1117/12.929221
Show Author Affiliations
T. Kitayama, Osaka Univ. (Japan)
H. Matsumura, Osaka Univ. (Japan)
K. Usuki, Osaka Univ. (Japan)
T. Kojima, Osaka Univ. (Japan)
J. Uchikoshi, Osaka Univ. (Japan)
Y. Higashi, High Energy Accelerator Research Organization (Japan)
K. Endo, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 8501:
Advances in Metrology for X-Ray and EUV Optics IV
Lahsen Assoufid; Peter Z. Takacs; Anand Krishna Asundi, Editor(s)

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