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Proceedings Paper

Object-depending artifacts in confocal measurements
Author(s): F. Mauch; W. Lyda; M. Gronle; W. Osten
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Paper Abstract

Confocal sensors are well established in optical surface metrology. Especially when measuring rough surfaces, their robustness is widely appreciated. However, it was shown lately that certain object features can produce severe artifacts in confocal measurements that are hard to identify as false measurements. Experimental evidence of these artifacts is given with a measurement of a suitable surface conducted with a chromatic confocal point sensor. Furthermore various simulations are presented that identify a self-imaging property of the surface features as the root of the artifacts. These simulations also pave the way to a more precise yet still intuitive signal model for confocal measurements.

Paper Details

Date Published: 11 October 2012
PDF: 11 pages
Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 846609 (11 October 2012); doi: 10.1117/12.929214
Show Author Affiliations
F. Mauch, Univ. Stuttgart (Germany)
W. Lyda, Univ. Stuttgart (Germany)
M. Gronle, Univ. Stuttgart (Germany)
W. Osten, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 8466:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
Michael T. Postek; Victoria A. Coleman; Ndubuisi G. Orji, Editor(s)

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