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Proceedings Paper

Chemical vapor deposition of graphene on copper at reduced temperatures
Author(s): Eric M. Gallo; Bruce I. Willner; Jeonghyun Hwang; Shangzhu Sun; Michael Spencer; Tom Salagaj; William C. Mitchel; Nick Sbrockey; Gary S. Tompa
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Paper Abstract

A preliminary study on reduced temperature chemical vapor deposition of graphene on copper substrates was performed. Graphene's exceptional mechanical strength, very high electrical and thermal conductivity, and stability at atomic layer thicknesses, generates potential for a broad range of applications, from nanodevices to transparent conductor to chemical sensor. Of the techniques demonstrated for graphene formation, chemical vapor deposition is the sole process suitable for manufacturing large area films. While large area film deposition of graphene has been shown on metal substrates, this process has been limited to high temperatures, 900-1000C, which increases the cost of production and limits methods of integrating the graphene with other material structures. In this work, CVD of graphene on copper foil was attempted over a range of temperatures (650 - 950C) on substrates as large as 5 x 15 cm in a horizontal tube reactor. Depositions were performed using both CVD and upstream Plasma-Enhanced CVD (PECVD), and the results are compared for both techniques. Quality of graphene films deposited with and without plasma enhancement was characterized by micro Raman spectroscopy.

Paper Details

Date Published: 27 September 2012
PDF: 7 pages
Proc. SPIE 8462, Carbon Nanotubes, Graphene, and Associated Devices V, 846203 (27 September 2012); doi: 10.1117/12.929094
Show Author Affiliations
Eric M. Gallo, Structured Materials Industries, Inc. (United States)
Bruce I. Willner, Structured Materials Industries, Inc. (United States)
Jeonghyun Hwang, Cornell Univ. (United States)
Shangzhu Sun, Structured Materials Industries, Inc. (United States)
Michael Spencer, Cornell Univ. (United States)
Tom Salagaj, Structured Materials Industries, Inc. (United States)
William C. Mitchel, Air Force Research Lab. (United States)
Nick Sbrockey, Structured Materials Industries, Inc. (United States)
Gary S. Tompa, Structured Materials Industries, Inc. (United States)


Published in SPIE Proceedings Vol. 8462:
Carbon Nanotubes, Graphene, and Associated Devices V
Didier Pribat; Young-Hee Lee; Manijeh Razeghi, Editor(s)

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