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Proceedings Paper

Plasma enhanced atomic layer deposition of silver thin films for applications in plasmonics and surface enhanced Raman scattering
Author(s): Erin R. Cleveland; Orest Glembocki; S. M. Prokes
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Paper Abstract

We have employed plasma-enhanced atomic layer deposition (PEALD) as a means to create multi-layered nanocomposite structures in order to enhance the plasmonic behavior and SERS response in the detection of benzenethiol (BZT). Ag PEALD films were deposited within nanoporous anodic aluminum oxide (AAO) templates of various pore depths, using Ag(fod)(PEt3)(fod=2,2-dimethyl-6,6,7,7,8,8,8-heptafluorooctane-3,5-dionato) as the precursor. We have examined the polycrystalline microstructure and conformality of the Ag films across the surface of an AAO template as well as into the pores, which varies significantly as thicknesses decrease. Furthermore, we investigated the plasmonic behavior of these films by performing SERS as a function of the Ag microstructure and conformality within the nanopores, using a 785 nm laser excitation and BZT as a test molecule, which forms a self-assembled monolayer on the Ag surface.

Paper Details

Date Published: 19 October 2012
PDF: 6 pages
Proc. SPIE 8467, Nanoepitaxy: Materials and Devices IV, 84670H (19 October 2012); doi: 10.1117/12.929033
Show Author Affiliations
Erin R. Cleveland, U.S. Naval Research Lab. (United States)
American Society for Engineering Education (United States)
Orest Glembocki, U.S. Naval Research Lab. (United States)
S. M. Prokes, U.S. Naval Research Lab. (United States)


Published in SPIE Proceedings Vol. 8467:
Nanoepitaxy: Materials and Devices IV
Nobuhiko P. Kobayashi; A. Alec Talin; M. Saif Islam, Editor(s)

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