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Proceedings Paper

Nanostructured TiO2 Thin Films for Field Emission and Sensor Applications
Author(s): N. C. Raut
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Paper Abstract

Thin films consisting TiO2 nanoparticles were synthesized by a cost effective ultrasonic spray pyrolysis technique on Si(100) and glass substrates at temperatures of 350 and 450 °C. The films were found to be anatase phase of TiO2 from GIXRD and Raman studies. Effect of substrate temperature on growth process was monitored using FESEM technique. The substrate temperature influenced the morphology of the films and also on the field emission properties. The asdeposited semi-conducting TiO2 films were investigated for the utilization of alcohol sensor at room temperature.

Paper Details

Date Published: 15 October 2012
PDF: 4 pages
Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85492I (15 October 2012); doi: 10.1117/12.927428
Show Author Affiliations
N. C. Raut, Indira Gandhi Ctr. for Atomic Research (India)

Published in SPIE Proceedings Vol. 8549:
16th International Workshop on Physics of Semiconductor Devices
Monica Katiyar; B. Mazhari; Y N Mohapatra, Editor(s)

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