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Proceedings Paper

Optical interrogation of a pressure sensor fabricated using MEMS technology
Author(s): Bhawna Dhingra; K. Thyagarajan; Sudhir Chandra; Ruchi Tiwari
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Paper Abstract

An optical MEMS (micro-electromechanical system) pressure sensor fabricated using bulk silicon micromachining techniques and tested using single wavelength interrogation technique is presented here. The sensor described here was designed for low pressure range applications. The operating principle of the sensor is Fabry-Perot (FP) interference. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, low hysteresis and a very good repeatability. Sensor’s response was found to be comparable with the theoretical predictions[3].

Paper Details

Date Published: 15 October 2012
PDF: 8 pages
Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854913 (15 October 2012); doi: 10.1117/12.927410
Show Author Affiliations
Bhawna Dhingra, Indian Institute of Technology Delhi (India)
K. Thyagarajan, Indian Institute of Technology Delhi (India)
Sudhir Chandra, Indian Institute of Technology Delhi (India)
Ruchi Tiwari, Indian Institute of Technology Delhi (India)


Published in SPIE Proceedings Vol. 8549:
16th International Workshop on Physics of Semiconductor Devices
Monica Katiyar; B. Mazhari; Y N Mohapatra, Editor(s)

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