Share Email Print
cover

Proceedings Paper

Fabrication of two dimensional carbon nanostructures using hot wire chemical vapor deposition technique
Author(s): Mukesh Singh; Himanshu S. Jha; Asha Yadav; . Lalhriatzuala; Dinesh Deva; Pratima Agarwal
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Two dimensional carbon nanostructures (carbon nanosheets) are fabricated using Hot Wire Chemical Vapor Deposition (HWCVD) technique assisted by H radical injection, using CH4 as source gas. Carbon nanosheets are grown on crystalline Si(100) wafer as well as on corning glass substrate without using catalyst. The grown carbon nanosheets are aligned vertically on the substrate with thickness in the range of 10-20 nm and about 60-80 nm in height.

Paper Details

Date Published: 15 October 2012
PDF: 5 pages
Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854926 (15 October 2012); doi: 10.1117/12.927273
Show Author Affiliations
Mukesh Singh, Indian Institute of Technology Guwahati (India)
Himanshu S. Jha, Indian Institute of Technology Guwahati (India)
Asha Yadav, Indian Institute of Technology Guwahati (India)
. Lalhriatzuala, Indian Institute of Technology Guwahati (India)
Dinesh Deva, Indian Institute of Technology Kanpur (India)
Pratima Agarwal, Indian Institute of Technology Guwahati (India)


Published in SPIE Proceedings Vol. 8549:
16th International Workshop on Physics of Semiconductor Devices
Monica Katiyar; B. Mazhari; Y N Mohapatra, Editor(s)

© SPIE. Terms of Use
Back to Top