Share Email Print
cover

Proceedings Paper

The impact of Process-Induced Mechanical Stress on Multi-Fingered Device Performance
Author(s): Naushad Alam; S. Dasgupta; Bulusu Anand
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper investigates the stress liner induced performance enhancement in multi-fingered devices. It is observed that the liner induced stress is not uniform in all the fingers and fingers located at the edges of multifingered devices have larger channel stress. As a result there is an unaccounted change in the drive current of fingers, sharing an active region, with the number of fingers in multi-fingered devices. It is observed that the average effective drive current in the fingers of seven fingered NMOSFET (PMOSFET) is ~4% (~17%) smaller than the single finger devices. We present a physically reasonable semi-empirical model relating average current and the number of fingers in a multi-fingered device. We show that using our model, one can predict the delay of an inverter with multi-fingered layout as a function of its number of device fingers.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854907 (15 October 2012); doi: 10.1117/12.925972
Show Author Affiliations
Naushad Alam, Indian Institute of Technology Roorkee (India)
S. Dasgupta, Indian Institute of Technology Roorkee (India)
Bulusu Anand, Indian Institute of Technology Roorkee (India)


Published in SPIE Proceedings Vol. 8549:
16th International Workshop on Physics of Semiconductor Devices
Monica Katiyar; B. Mazhari; Y N Mohapatra, Editor(s)

© SPIE. Terms of Use
Back to Top