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Proceedings Paper

Design, development, and manufacturing of highly advanced and cost effective aluminium sputtering plant for large area telescopic mirrors.
Author(s): Rajeev R. Pillai; Sanjith K. K.; K. Mohanachandran; Nagarjun Sakhamuri; Vishal Shukla; Alok Gupta
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Paper Abstract

The design, development and manufacturing of a fully automated and cost effective aluminum sputtering unit for the deposition of aluminum on large area telescopic mirrors (maximum diameter of 3600mm) is presented here. The unit employs DC planar magnetron sputtering for the deposition process. A large area glow discharge unit is also designed for the pre-cleaning of the mirrors prior to aluminum coating. A special kinematic support structure with rotation is designed to support heavy mirrors of large area to minimize the deflection of the mirrors during deposition process. A custom designed 'mask' is employed in the magnetron system to improve the thickness uniformity within <±3%. The adhesion, thickness uniformity and reflectivity properties are studied in detail to validate the sputtering plant. Special fixtures have been designed for the system to accommodate smaller mirrors and studies have been conducted for the coatings and reported in the paper. The unit was successfully tested at HHV facility in Bangalore and will be installed at the ARIES Facility, Nainital.

Paper Details

Date Published: 10 October 2012
PDF: 7 pages
Proc. SPIE 8444, Ground-based and Airborne Telescopes IV, 844428 (10 October 2012); doi: 10.1117/12.925833
Show Author Affiliations
Rajeev R. Pillai, Hind High Vacuum Co. Pvt. Ltd. (India)
Sanjith K. K., Hind High Vacuum Co. Pvt. Ltd. (India)
K. Mohanachandran, Hind High Vacuum Co. Pvt. Ltd. (India)
Nagarjun Sakhamuri, Hind High Vacuum Co. Pvt. Ltd. (India)
Vishal Shukla, Aryabhatta Research Institute of Observational Sciences (India)
Alok Gupta, Aryabhatta Research Institute of Observational Sciences (India)


Published in SPIE Proceedings Vol. 8444:
Ground-based and Airborne Telescopes IV
Larry M. Stepp; Roberto Gilmozzi; Helen J. Hall, Editor(s)

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