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Proceedings Paper

Metrology system for the calibration of multi-dof precision mechanisms
Author(s): Lorenzo Zago; Mirsad Sarajlic; Fabien Chevalley; Dehua Yang
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Paper Abstract

We have developed a novel metrology system for precision XY measurements based on a concept developed originally in an industrial vision context by which USB cameras observe a target with a special dots pattern. The system has then been extended to Rx-Ry (tip-tilt), Z and Rz measurements by adding more cameras within a suitable configuration. The basic principle is described, first validated on a preliminary experimental implementation used for testing a new type of hexapod. We then illustrate the setup designed as calibration bench for hexapods used as positioning devices of the secondary mirrors of astronomical telescopes. While work is still ongoing for improving this new metrology system, currently achieved performances are a stability of is ≤1 μm along linear degrees of freedom, respectively 0.5 arcsec for tip-tilt; absolute accuracy over ranges of a few millimeters is 5-10 μm , respectively arcsec; incremental accuracy is 2-3 μm, respectively 5 arcsec.

Paper Details

Date Published: 13 September 2012
PDF: 10 pages
Proc. SPIE 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II, 845039 (13 September 2012); doi: 10.1117/12.925710
Show Author Affiliations
Lorenzo Zago, Univ. of Applied Sciences of Western Switzerland (Switzerland)
Mirsad Sarajlic, Univ. of Applied Sciences of Western Switzerland (Switzerland)
Fabien Chevalley, Univ. of Applied Sciences of Western Switzerland (Switzerland)
Dehua Yang, Nanjing Institute for Astronomical Optics and Technology (China)


Published in SPIE Proceedings Vol. 8450:
Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II
Ramón Navarro; Colin R. Cunningham; Eric Prieto, Editor(s)

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