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Proceedings Paper

Design and simulation of RF MEMS SPST shunt and SPDT shunt-shunt switches for X-band and Ku-band applications
Author(s): Manas Kumar Lenka; Amit Sharma; Jaibir Sharma; Amitava DasGupta
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Paper Abstract

This paper describes the design and simulation of RF MEMS SPST shunt and SPDT shunt-shunt switches with modified coplanar waveguide (CPW) configuration for X-band and Ku-band applications exhibiting high isolation and low insertion loss. By modifying the basic CPW structure for a six-strip membrane having length 720 μm, the resonant frequency can be reduced from 33.5 GHz to 13.5 GHz with isolation as high as -30 dB(-63 dB at resonant frequency) in Ku-band. Similar results are also found in case SPST and SPDT switches with other membrane types.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85491F (15 October 2012); doi: 10.1117/12.925703
Show Author Affiliations
Manas Kumar Lenka, Indian Institute of Technology Madras (India)
Amit Sharma, Indian Institute of Technology Madras (India)
Jaibir Sharma, Indian Institute of Technology Madras (India)
Amitava DasGupta, Indian Institute of Technology Madras (India)


Published in SPIE Proceedings Vol. 8549:
16th International Workshop on Physics of Semiconductor Devices
Monica Katiyar; B. Mazhari; Y N Mohapatra, Editor(s)

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