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Proceedings Paper

Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics
Author(s): Jianqiang Ma; Ying Liu; Chen Xu; Hao Rong; Baoqing Li; Jiaru Chu
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Paper Abstract

A low-cost silicon unimorph deformable mirror (DM) with 214 actuators is presented. The finite element simulation indicates that the designed DM has an excellent correction performance for both low order and high order aberrations. The experimental actuator deflection is about 2μm at 100V. This DM has the potential to be used for astronomical adaptive optics.

Paper Details

Date Published: 13 September 2012
PDF: 6 pages
Proc. SPIE 8447, Adaptive Optics Systems III, 844707 (13 September 2012); doi: 10.1117/12.925522
Show Author Affiliations
Jianqiang Ma, Univ. of Science and Technology of China (China)
Ying Liu, Univ. of Science and Technology of China (China)
Chen Xu, Nanjing Institute of Astronomical Optics & Technology (China)
Hao Rong, Univ. of Science and Technology of China (China)
Baoqing Li, Univ. of Science and Technology of China (China)
Jiaru Chu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 8447:
Adaptive Optics Systems III
Brent L. Ellerbroek; Enrico Marchetti; Jean-Pierre Véran, Editor(s)

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