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Proceedings Paper

MEMS Deformable Mirrors: Technology and Applications
Author(s): Amita Gupta; R. Singh; Monika Chaudhary; Shailesh Kumar; A. K. Meena
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Paper Abstract

The micromachined deformable or adaptive mirrors are being used in modern optical systems for astronomical imaging, laser-based communications and biomedical imaging. Deformable mirror fabricated using MEMS technology is a low cost, compact adaptive optical element for correction of the lower order optical aberrations such as defocus & astigmatism. In this paper, important development aspects of micromachined membrane mirror are discussed. The device has been successfully fabricated and characterized for various applications.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 85491B (15 October 2012); doi: 10.1117/12.925268
Show Author Affiliations
Amita Gupta, Solid State Physics Lab. (India)
R. Singh, Solid State Physics Lab. (India)
Monika Chaudhary, Solid State Physics Lab. (India)
Shailesh Kumar, Solid State Physics Lab. (India)
A. K. Meena, Solid State Physics Lab. (India)


Published in SPIE Proceedings Vol. 8549:
16th International Workshop on Physics of Semiconductor Devices
Monica Katiyar; B. Mazhari; Y N Mohapatra, Editor(s)

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