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Proceedings Paper

An imaging displacement sensor with nanometer accuracy
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Paper Abstract

An imaging displacement sensor (IDS) has been developed that can measure the displacement with an accuracy of 30 nm in 0.03 s with the precision improving to 1 nm for averaging times of 100 s. The IDS consists simply of a light emitting diode (LED) pinhole collimator and a charge-coupled device (CCD) camera chip. The position accuracy is better than 0.05% over the few mm CCD size with deviation from linearity <140 nm. All six degrees of freedom (DoF), three translations and three angles, can be measured with the same accuracy by combining multiple IDS with different collimator beam orientations and knowing the nominal separation between the collimators and CCDs.

Paper Details

Date Published: 13 September 2012
PDF: 12 pages
Proc. SPIE 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II, 84500U (13 September 2012); doi: 10.1117/12.925231
Show Author Affiliations
David Woody, Owens Valley Radio Observatory, California Institute of Technology (United States)
David Redding, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 8450:
Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II
Ramón Navarro; Colin R. Cunningham; Eric Prieto, Editor(s)

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