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Proceedings Paper

Tunable MEMS Diffraction Gratings
Author(s): V. Gowri Suresh; Nandita DasGupta; Shanti Bhattacharya
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Paper Abstract

Tunable gratings find applications in spectrometers, tunable cavity lasers and projection displays. In this paper, we discuss the design, modeling, fabrication process and optical characterization of a reflective type period tunable MEMS diffraction grating. The optical modeling of different grating periods for optimum efficiency is presented. A new fixed-fixed beam design with a uniform displacement over 33% of its length is proposed and simulated. The grating membranes are fabricated with gold metal. The optical characterization of the fabricated structure is presented.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854918 (15 October 2012); doi: 10.1117/12.925113
Show Author Affiliations
V. Gowri Suresh, Indian Institute of Technology Madras (India)
Nandita DasGupta, Indian Institute of Technology Madras (India)
Shanti Bhattacharya, Indian Institute of Technology Madras (India)


Published in SPIE Proceedings Vol. 8549:
16th International Workshop on Physics of Semiconductor Devices
Monica Katiyar; B. Mazhari; Y N Mohapatra, Editor(s)

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