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Proceedings Paper

Design aspects of electrostatically driven MEMS adaptive mirror
Author(s): Shailesh Kumar; Amita Gupta
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Paper Abstract

Adaptive mirrors are used in modern adaptive optics systems for direct correction of aberration in a wave front. Silicon nitride membranes are widely used in the fabrication of MEMS deformable mirror In this paper, we have studied the design and simulation aspects of MEMS based electrostatically actuated continuous membrane adaptive mirror. We have studied the effect of several factors e.g. thickness and size of mirror membrane, size of bottom electrodes & voltage applied between top & bottom electrodes on response of the mirror.

Paper Details

Date Published: 15 October 2012
PDF: 7 pages
Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854917 (15 October 2012); doi: 10.1117/12.925110
Show Author Affiliations
Shailesh Kumar, Solid State Physics Lab. (India)
Amita Gupta, Solid State Physics Lab. (India)

Published in SPIE Proceedings Vol. 8549:
16th International Workshop on Physics of Semiconductor Devices
Monica Katiyar; B. Mazhari; Y N Mohapatra, Editor(s)

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