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Proceedings Paper

MEMS: fabrication of cryogenic bolometers
Author(s): J. Kunert; S. Anders; T. May; V. Zakosarenko; G. Zieger; E. Kreysa; H.-G. Meyer
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Paper Abstract

Cryogenic bolometers are among the most sensitive devices for the detection of electromagnetic radiation in the submillimeter wavelength range. Such radiation is of interest for astronomical observations as well as for security checks. We describe how we fabricate an array of these bolometers. Standard contact lithography is sufficient for these relatively coarse features. To increase the sensitivity, it is imperative to weaken the thermal link between the thermistors (the sensing devices) and the temperature bath. This is achieved by placing them on a silicon nitride membrane that is structured so that the thermistors are placed on a platform which is held only by a few beams. The fabrication process does not require sophisticated lithographic techniques, but special care to achieve the desired yield of 100 % intact bolometers in one array. We discuss bolometer basics and requirements for our applications, critical fabrication issues, and show results of complete systems built for a radio telescope and for security cameras.

Paper Details

Date Published: 17 April 2012
PDF: 6 pages
Proc. SPIE 8352, 28th European Mask and Lithography Conference, 83520F (17 April 2012); doi: 10.1117/12.923707
Show Author Affiliations
J. Kunert, Institute of Photonic Technology (Germany)
S. Anders, Institute of Photonic Technology (Germany)
T. May, Institute of Photonic Technology (Germany)
V. Zakosarenko, Institute of Photonic Technology (Germany)
G. Zieger, Institute of Photonic Technology (Germany)
E. Kreysa, Max Planck Institute for Radioastronomy (Germany)
H.-G. Meyer, Institute of Photonic Technology (Germany)


Published in SPIE Proceedings Vol. 8352:
28th European Mask and Lithography Conference
Uwe F.W. Behringer; Wilhelm Maurer, Editor(s)

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