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Proceedings Paper

Structural and electrophysical properties of femtosecond laser exposed hydrogenated amorphous silicon films
Author(s): Andrey V. Emelyanov; Mark V. Khenkin; Andrey G. Kazanskii; Pavel A. Forsh; Pavel K. Kashkarov; Evgeny V. Lyubin; Andrey A. Khomich; Mindaugas Gecevicius; Martynas Beresna; Peter G. Kazansky
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Paper Abstract

This paper studies the effect of femtosecond laser treatment in air of hydrogenated amorphous silicon thin films (a-Si:H) on their structural, electrical and photoelectric properties. The possibility of laser-induced crystallization of a-Si:H films with controlled crystalline volume fraction was shown. A sufficient increase of dark conductivity was observed for laser treated a-Si:H films which crystallinity exceeds 7%. Such increase was attributed to change in conductivity mechanism. However, spectral dependences of absorption coefficient did not show any qualitative changes with the laser fluence increase. It was found that spallation and oxidation of the film took place when laser fluence became reasonably high.

Paper Details

Date Published: 2 May 2012
PDF: 8 pages
Proc. SPIE 8438, Photonics for Solar Energy Systems IV, 84381I (2 May 2012); doi: 10.1117/12.922896
Show Author Affiliations
Andrey V. Emelyanov, M. V. Lomonosov Moscow State Univ. (Russian Federation)
Mark V. Khenkin, M. V. Lomonosov Moscow State Univ. (Russian Federation)
Andrey G. Kazanskii, M. V. Lomonosov Moscow State Univ. (Russian Federation)
Pavel A. Forsh, M. V. Lomonosov Moscow State Univ. (Russian Federation)
Kurchatov Institute (Russian Federation)
Pavel K. Kashkarov, M. V. Lomonosov Moscow State Univ. (Russian Federation)
Kurchatov Institute (Russian Federation)
Evgeny V. Lyubin, M. V. Lomonosov Moscow State Univ. (Russian Federation)
Andrey A. Khomich, Prokhorov General Physics Institute (Russian Federation)
Mindaugas Gecevicius, Univ. of Southampton (United Kingdom)
Martynas Beresna, Univ. of Southampton (United Kingdom)
Peter G. Kazansky, Univ. of Southampton (United Kingdom)


Published in SPIE Proceedings Vol. 8438:
Photonics for Solar Energy Systems IV
Ralf Wehrspohn; Andreas Gombert, Editor(s)

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