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Proceedings Paper

Laser thermoreflectance for semiconductor thin films metrology
Author(s): P. Gailly; J. Hastanin; C. Duterte; Y. Hernandez; J.-B. Lecourt; A. Kupisiewicz; P.-E. Martin; K. Fleury-Frenette
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Paper Abstract

We present a thermoreflectance-based metrology concept applied to compound semiconductor thin films off-line characterization in the solar cells scribing process. The presented thermoreflectance setup has been used to evaluate the thermal diffusivity of thin CdTe films and to measure eventual changes in the thermal properties of 5 μm CdTe films ablated by nano and picosecond laser pulses. The temperature response of the CdTe thin film to the nanosecond heating pulse has been numerically investigated using the finite-difference time-domain (FDTD) method. The computational and experimental results have been compared.

Paper Details

Date Published: 2 May 2012
PDF: 9 pages
Proc. SPIE 8438, Photonics for Solar Energy Systems IV, 84381F (2 May 2012); doi: 10.1117/12.922576
Show Author Affiliations
P. Gailly, Univ. de Liège (Belgium)
J. Hastanin, Univ. de Liège (Belgium)
C. Duterte, MULTITEL (Belgium)
Y. Hernandez, MULTITEL (Belgium)
J.-B. Lecourt, MULTITEL (Belgium)
A. Kupisiewicz, LASEA (Belgium)
P.-E. Martin, LASEA (Belgium)
K. Fleury-Frenette, Univ. de Liège (Belgium)

Published in SPIE Proceedings Vol. 8438:
Photonics for Solar Energy Systems IV
Ralf Wehrspohn; Andreas Gombert, Editor(s)

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