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Proceedings Paper

Silicon-on-insulator (SOI) nanobeam optical cavities for refractive index based sensing
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Paper Abstract

We present the design modelling and fabrication of Silicon-On-Insulator (SOI) nanobeam cavities that are immersed in a microfluidic system for refractive index sensing. The device has sensitivity value of greater than 200 nm/RIU with a Q-factor more than 20 000 in water. It was fabricated on a SOI platform and working at telecom wavelengths. The use of the SOI platform also offers further possibilities of integration with CMOS technologies.

Paper Details

Date Published: 9 May 2012
PDF: 6 pages
Proc. SPIE 8439, Optical Sensing and Detection II, 84391Q (9 May 2012); doi: 10.1117/12.922554
Show Author Affiliations
M. Ghazali A. Rahman, Univ. of Glasgow (United Kingdom)
Philippe Velha, Univ. of Glasgow (United Kingdom)
Richard M. De La Rue, Univ. of Glasgow (United Kingdom)
Univ. of Malaya (Malaysia)
Nigel P. Johnson, Univ. of Glasgow (United Kingdom)


Published in SPIE Proceedings Vol. 8439:
Optical Sensing and Detection II
Francis Berghmans; Anna Grazia Mignani; Piet De Moor, Editor(s)

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