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Proceedings Paper

Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations
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Paper Abstract

One of considerable sources of displacement measurement uncertainty in nanometrology systems such as multidimensional interferometric positioning for local probe microscopy is the influence of amplitude and especially frequency noise of a laser source which powers the interferometers. We investigated the noise properties of several laser sources suitable for interferometry for micro- and nano-CMMs (coordinate measurement machines) and compared the results with the aim to find the best option. The influences of amplitude and frequency fluctuations were compared together with the noise and uncertainty contributions of other components of the whole measuring system. Frequency noise of investigated laser sources was measured by two approaches - at first with the help of frequency discriminator (Fabry-Perot resonator) converting the frequency (phase) noise into amplitude one and then directly through the measurement of displacement noise at the output of the interferometer fringe detection and position evaluation. Both frequency noise measurements and amplitude noise measurements were done simultaneously through fast and high dynamic range synchronous sampling to have the possibility to separate the frequency noise and to compare the recorded results.

Paper Details

Date Published: 28 April 2012
PDF: 9 pages
Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84301D (28 April 2012); doi: 10.1117/12.922439
Show Author Affiliations
Jan Hrabina, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Josef Lazar, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Ondrej Cip, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 8430:
Optical Micro- and Nanometrology IV
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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