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Proceedings Paper

Application of linear systems theory to characterize coherence scanning interferometry
Author(s): Rahul Mandal; Kanik Palodhi; Jeremy Coupland; Richard Leach; Daniel Mansfield
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Paper Abstract

This paper considers coherence scanning interferometry as a linear filtering operation that is characterised by a point spread function in the space domain or equivalently a transfer function in the frequency domain. The applicability of the theory is discussed and the effects of these functions on the measured interferograms, and their influence on the resulting surface measurements, are described. The practical characterisation of coherence scanning interferometers using a spherical reference artefact is then considered and a new method to compensate measurement errors, based on a modified inverse filter, is demonstrated.

Paper Details

Date Published: 7 May 2012
PDF: 10 pages
Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300T (7 May 2012); doi: 10.1117/12.922435
Show Author Affiliations
Rahul Mandal, Loughborough Univ. (United Kingdom)
Kanik Palodhi, Loughborough Univ. (United Kingdom)
Jeremy Coupland, Loughborough Univ. (United Kingdom)
Richard Leach, National Physical Lab. (United Kingdom)
Daniel Mansfield, Taylor Hobson Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 8430:
Optical Micro- and Nanometrology IV
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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