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Proceedings Paper

Optical analysis of orange peel on metallic surfaces
Author(s): M. L. Miranda-Medina; T. Wagner; J. A. Böhm; A. Vernes; K. Hingerl
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Paper Abstract

In this contribution, the orange peel on highly polished metallic surfaces was analysed by means of a 3D interferometric microscope and also using spectroscopic ellipsometry. Firstly, the surface topography of polished metallic samples, in view to detect orange peel, was determined using a phase-shifting interferometer. This metrological 3D analysis showed that the orange peel can be seen as a periodic waviness on the surface. Then the optical properties of the investigated samples were studied via spectroscopic ellipsometry at various incident angles. These ellipsometric measurements proved that the samples have peculiar optical properties. In particular, it was found that the resulting pseudo-dielectric function in the entire range from 1.5 eV to 2.5 eV - as obtained based on the measured ellipsometric parameters - does depend on the surface topography of the samples. Based in this experimental finding, it is then immediately shown that spectroscopic ellipsometry can be applied to qualitatively describe the orange peel on highly polished metallic surfaces.

Paper Details

Date Published: 4 May 2012
PDF: 7 pages
Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300P (4 May 2012); doi: 10.1117/12.922366
Show Author Affiliations
M. L. Miranda-Medina, AC2T Research GmbH (Austria)
T. Wagner, AC2T Research GmbH (Austria)
J. A. Böhm, AC2T Research GmbH (Austria)
A. Vernes, AC2T Research GmbH (Austria)
Technische Univ. Wien (Austria)
K. Hingerl, Johannes Kepler Univ. Linz (Austria)


Published in SPIE Proceedings Vol. 8430:
Optical Micro- and Nanometrology IV
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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