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Proceedings Paper

Design and implementation of IR microspectrometers based on linear-variable optical filters
Author(s): Arvin Emadi; Huaiwen Wu; Ger de Graaf; Reinoud Wolffenbuttel
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Paper Abstract

This paper presents the design, fabrication and characterization of Infra-Red (IR) Linear Variable Optical Filter (LVOF)- based micro-spectrometers. Two LVOF microspectrometer designs have been realized: one for operating in the 1400 nm to 2500 nm wavelength range and another between 3000 nm and 5000 nm. The IR LVOFs have been fabricated in an ICCompatible process using resist reflow. The LVOF provides the possibility to have a small size, robust and highresolution micro-spectrometer in the IR on a detector chip. Such IR microspectrometers can be fabricated at low-cost in high volume production and have huge potential in applications such as liquid identification (e.g. water in alcohol, water in oil) and gas sensing.

Paper Details

Date Published: 9 May 2012
PDF: 7 pages
Proc. SPIE 8439, Optical Sensing and Detection II, 84391O (9 May 2012); doi: 10.1117/12.922320
Show Author Affiliations
Arvin Emadi, Technische Univ. Delft (Netherlands)
Huaiwen Wu, Technische Univ. Delft (Netherlands)
Ger de Graaf, Technische Univ. Delft (Netherlands)
Reinoud Wolffenbuttel, Technische Univ. Delft (Netherlands)

Published in SPIE Proceedings Vol. 8439:
Optical Sensing and Detection II
Francis Berghmans; Anna Grazia Mignani; Piet De Moor, Editor(s)

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