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Proceedings Paper

IR-SWLI for subsurface imaging of large MEMS structures
Author(s): A. Nolvi; V. Heikkinen; I. Kassamakov; J. Aaltonen; T. Ylitalo; O. Saresoja; M. Berdova; S. Franssila; E. Hæggström
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Paper Abstract

LED based infrared scanning white light interferometry (IR-SWLI) permits non-destructive imaging of embedded MEMS structures. We built an IR-SWLI instrument featuring a custom-built IR-range LED-based light source, capable of stroboscopic use. The source combines multiple separately controllable LEDs with different wavelengths into a collimated homogenous beam offering an adjustable spectrum. We employ software-based image stitching to form millimeter-size 3D images from multiple high magnification scans. These images delineate three layers in a MEMS cavity covered by silicon and reveal a micron-size inlet inside the channel.

Paper Details

Date Published: 4 May 2012
PDF: 8 pages
Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 843018 (4 May 2012); doi: 10.1117/12.922105
Show Author Affiliations
A. Nolvi, Univ. of Helsinki (Finland)
V. Heikkinen, Univ. of Helsinki (Finland)
I. Kassamakov, Univ. of Helsinki (Finland)
Helsinki Institute of Physics (Finland)
J. Aaltonen, Helsinki Institute of Physics (Finland)
T. Ylitalo, Univ. of Helsinki (Finland)
O. Saresoja, Univ. of Helsinki (Finland)
M. Berdova, Aalto Univ. (Finland)
S. Franssila, Aalto Univ. (Finland)
E. Hæggström, Univ. of Helsinki (Finland)

Published in SPIE Proceedings Vol. 8430:
Optical Micro- and Nanometrology IV
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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