Share Email Print

Proceedings Paper

Advanced optical characterization of micro solid immersion lens
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We report on the advanced optical characterizations of microfabricated solid immersion lenses with 2-μm diameter, operating at λ= 642 nm. The main feature, the spot size reduction, has been investigated by applying a focused Gaussian beam of NA = 0.9. Particular illuminating beams, e.g., Bessel-Gauss beams of the zeroth and the first order, a doughnutshape beam and its decompositions, i.e. two-half-lobes beams, have also been used to influence the shape of the immersed focal spot. Detailed optical characterizations have been conducted by measuring the amplitude and phase distributions with a high-resolution interference microscope (HRIM) in volume around the focal spot. The immersion effect of the SiO2 solid immersion lens leads to a spot-size reduction of approximately 1.5 which agrees well with theory. Particularly shaped incident beams exhibit a comparable size reduction of the immersed spots. Such structured focal spots are of significant interest in optical trapping, lithography, and optical data storage systems.

Paper Details

Date Published: 4 May 2012
PDF: 10 pages
Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300E (4 May 2012); doi: 10.1117/12.921871
Show Author Affiliations
Myun-Sik Kim, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Toralf Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Mickael Brun, CEA-LETI-Minatec (France)
Segolene Olivier, CEA-LETI-Minatec (France)
Sergio Nicoletti, CEA-LETI-Minatec (France)
Hans Peter Herzig, CEA-LETI-Minatec (France)

Published in SPIE Proceedings Vol. 8430:
Optical Micro- and Nanometrology IV
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

© SPIE. Terms of Use
Back to Top