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Proceedings Paper

Holographic exposure of subwavelength circular gratings using a cone based interferogram
Author(s): Jean Sauvage-Vincent; Svetlen Tonchev; Yves Jourlin; Olivier Parriaux
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Paper Abstract

Fabrication of circular gratings formed of radially periodic circular lines is presented. It is a very simple fringes projection set-up based on holistic printing method using a axicon to generate the self-interferogramm of a Bessel beam using a transmissive cone. The new holographic optical interference scheme has been designed to produce circular lines based interferogram from a azimuthally polarized beam. The angle of the cone is adapted to cover a restricted periods range. The principle of the method is described and applied to the fabrication of a radial polarizer of sub-micron period.

Paper Details

Date Published: 10 May 2012
PDF: 6 pages
Proc. SPIE 8428, Micro-Optics 2012, 84280D (10 May 2012); doi: 10.1117/12.921863
Show Author Affiliations
Jean Sauvage-Vincent, Lab. Hubert Curien, CNRS (France)
Hologram Industries (France)
Svetlen Tonchev, Lab. Hubert Curien, CNRS (France)
Yves Jourlin, Lab. Hubert Curien, CNRS (France)
Olivier Parriaux, Lab. Hubert Curien, CNRS (France)


Published in SPIE Proceedings Vol. 8428:
Micro-Optics 2012
Hugo Thienpont; Jürgen Mohr; Hans Zappe; Hirochika Nakajima, Editor(s)

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