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Proceedings Paper

High performance Al bi-layer wire-grid polarizer for deep-ultraviolet to infrared: modeling and design
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Paper Abstract

Metallic wire-grid polarizers (WGP) transmit TM-polarized light (transverse magnetic) and reflect TE polarization (transverse electric) efficiently. They are compact, planar and compatible with integrated circuit (IC) fabrication, which simplifies their use as optical components in nanophotonic, fiber optic, display, and detector devices. In this work, Al bi-layer WGPs were designed and numerically simulated using finite element methods. Optical properties of the polarizers were analyzed in the deep-ultraviolet (DUV) to infrared (IR) regions. It was observed that Al bi-layer WGPs show broadband and high TM transmission and extinction ratio. A comparison of the performances of single and bi-layer WGPs show that the latter is highly advantageous over the former one. An extensive study of the dependence of the optical properties of single and bi-layer WGPs on structural parameters, such as period, metal thickness, and, duty cycle (DC), is provided. Optimal structural parameters are obtained within the feasible parameters in terms of nanofabrication. An Al bi-layer polarizer with a period of 80 nm and a metal layer thickness of 40 nm showed transmission up to 80% and extinction of 40 dB (104) and broadband polarizing behavior down to a wavelength of 250 nm.

Paper Details

Date Published: 1 May 2012
PDF: 8 pages
Proc. SPIE 8424, Nanophotonics IV, 842429 (1 May 2012); doi: 10.1117/12.921837
Show Author Affiliations
Li Wang, Paul Scherrer Institute (Switzerland)
Harun H. Solak, Eulitha AG (Switzerland)
Yasin Ekinci, Paul Scherrer Institute (Switzerland)
ETH Zürich (Switzerland)

Published in SPIE Proceedings Vol. 8424:
Nanophotonics IV
David L. Andrews; Jean-Michel Nunzi; Andreas Ostendorf, Editor(s)

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