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Proceedings Paper

Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films
Author(s): L. Karvonen; A. Säynätjoki; X. Tu; T. Y. Liow; M. Hiltunen; J. Hiltunen; A. Tervonen; G. Q. Lo; S. Honkanen
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Paper Abstract

We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al2O3) and double (Al2O3-TiO2) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides.

Paper Details

Date Published: 15 May 2012
PDF: 7 pages
Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 84311M (15 May 2012); doi: 10.1117/12.921805
Show Author Affiliations
L. Karvonen, Aalto Univ. (Finland)
A. Säynätjoki, Aalto Univ. (Finland)
X. Tu, A*STAR Institute of Microelectronics (Singapore)
T. Y. Liow, A*STAR Institute of Microelectronics (Singapore)
M. Hiltunen, VTT Technical Research Ctr. of Finland (Finland)
J. Hiltunen, VTT Technical Research Ctr. of Finland (Finland)
A. Tervonen, Aalto Univ. (Finland)
G. Q. Lo, A*STAR Institute of Microelectronics (Singapore)
S. Honkanen, Aalto Univ. (Finland)
Univ. of Eastern Finland (Finland)


Published in SPIE Proceedings Vol. 8431:
Silicon Photonics and Photonic Integrated Circuits III
Laurent Vivien; Seppo K. Honkanen; Lorenzo Pavesi; Stefano Pelli, Editor(s)

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