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Proceedings Paper

Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform
Author(s): Peter Verheyen; Guy Lepage; Joris Van Campenhout; Marianna Pantouvaki; Philippe Absil; Peter De Heyn; Wim Bogaerts; Pieter Dumon; Shankar Selvaraja
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Paper Abstract

A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors. This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the flow.

Paper Details

Date Published: 10 May 2012
PDF: 8 pages
Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 843114 (10 May 2012); doi: 10.1117/12.921747
Show Author Affiliations
Peter Verheyen, IMEC (Belgium)
Guy Lepage, IMEC (Belgium)
Joris Van Campenhout, IMEC (Belgium)
Marianna Pantouvaki, IMEC (Belgium)
Philippe Absil, IMEC (Belgium)
Peter De Heyn, Ghent Univ. (Belgium)
Wim Bogaerts, Ghent Univ. (Belgium)
Pieter Dumon, Ghent Univ. (Belgium)
Shankar Selvaraja, Ghent Univ. (Belgium)


Published in SPIE Proceedings Vol. 8431:
Silicon Photonics and Photonic Integrated Circuits III
Laurent Vivien; Seppo K. Honkanen; Lorenzo Pavesi; Stefano Pelli, Editor(s)

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