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Proceedings Paper

Scalar diffraction theory for azimuthally structured Fresnel zone plate
Author(s): Thordis Vierke; Jürgen Jahns
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Paper Abstract

Some applications like the development of lithographic systems require a possibility to focus EUV and x-ray radiation, but for those wavelengths no transparent material exists. For that reason the use of diffractive lenses is interesting [1]. The classical Fresnel zone plate (FZP) is in theory a good solution but the individual rings need to be hold in place. An alternative is given in [2] but to keep the main structure of an FZP one can use bridges which connect the rings to each other. The resulting structure is called azimuthally structured Fresnel zone plate (aFZP) and can be described with the following parameters: The number L of rings, the number M of openings in the innermost ring and the increase of openings ▵M for each ring moving outwards. Figure 1.a) shows the classical FZP with alternating opaque and transmitting zones. Figure 1.b) shows the aFZP with bridges to hold the rings in place. A similar structure has been investigated by Mitsuishi et al. [3]. Reasonable experimental results of the diffraction characteristics were shown. The corresponding anlytical model is explained here.

Paper Details

Date Published: 8 May 2012
PDF: 10 pages
Proc. SPIE 8428, Micro-Optics 2012, 84280V (8 May 2012); doi: 10.1117/12.921470
Show Author Affiliations
Thordis Vierke, FernUniv. in Hagen (Germany)
Jürgen Jahns, FernUniv. in Hagen (Germany)

Published in SPIE Proceedings Vol. 8428:
Micro-Optics 2012
Hugo Thienpont; Jürgen Mohr; Hans Zappe; Hirochika Nakajima, Editor(s)

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