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Proceedings Paper

Nanoimprint activities in Austria in the research project cluster NILaustria
Author(s): Michael Mühlberger; Hannes Fachberger; Iris Bergmair; Michael Rohn; Bernd Dittert; Rainer Schöftner; Thomas Rothländer; Dieter Nees; Ursula Palfinger; Anja Haase; Alexander Fian; Martin Knapp; Claudia Preininger; Gerald Kreindl; Michael Kast; Thomas Fromherz
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Paper Abstract

The NILaustria research project cluster consists of 8 individual research projects and aims to improve nanoimprint lithography in an application driven approach. The cluster is presented as well as highlights from the projects, e.g. the replication of 12.5nm half pitch features using working stamp copies, topics from organic electronics, metamaterials and SiGe technology. An outlook on the new activities is given.

Paper Details

Date Published: 17 April 2012
PDF: 8 pages
Proc. SPIE 8352, 28th European Mask and Lithography Conference, 83520O (17 April 2012); doi: 10.1117/12.921324
Show Author Affiliations
Michael Mühlberger, PROFACTOR GmbH (Austria)
Hannes Fachberger, PROFACTOR GmbH (Austria)
Iris Bergmair, PROFACTOR GmbH (Austria)
Michael Rohn, PROFACTOR GmbH (Austria)
Bernd Dittert, PROFACTOR GmbH (Austria)
Rainer Schöftner, PROFACTOR GmbH (Austria)
Thomas Rothländer, JOANNEUM RESEARCH Forschungsgesellschaft mbH (Austria)
Dieter Nees, JOANNEUM RESEARCH Forschungsgesellschaft mbH (Austria)
Ursula Palfinger, JOANNEUM RESEARCH Forschungsgesellschaft mbH (Austria)
Anja Haase, JOANNEUM RESEARCH Forschungsgesellschaft mbH (Austria)
Alexander Fian, JOANNEUM RESEARCH Forschungsgesellschaft mbH (Austria)
Martin Knapp, OnkoTec Gmbh (Austria)
Claudia Preininger, AIT Austrian Institute of Technology GmbH (Austria)
Gerald Kreindl, EV Group (Austria)
Michael Kast, EV Group (Austria)
Thomas Fromherz, Johannes Kepler Univ. Linz (Austria)


Published in SPIE Proceedings Vol. 8352:
28th European Mask and Lithography Conference
Uwe F.W. Behringer; Wilhelm Maurer, Editor(s)

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