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Proceedings Paper

Bridging the resolution gap in 14 nm: designing for efficient transition to EUV
Author(s): Lars W. Liebmann
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Date Published:
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Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 832702; doi: 10.1117/12.920027
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Lars W. Liebmann, IBM Corp. (United States)


Published in SPIE Proceedings Vol. 8327:
Design for Manufacturability through Design-Process Integration VI
Mark E. Mason, Editor(s)

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