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Proceedings Paper

Nanomanipulation system for scanning electron microscope
Author(s): P. Woo; I. Mekuz; B. Chen
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Paper Abstract

Traditionally scanning electron microscopy (SEM) is often used as a scientific instrument for providing high magnification images and analytical capability for microstructural analysis. In recent years different applications for SEM has been developed and is gaining popularity in doing characterizations of fine-scale materials such as in-situ annealing, cryo-microscopy, micro-tensile testing, electrical resistivity measurements and grain boundary/texture analysis (EBSD). With the increasing demand in these sub-micron to nano-scale characterizations, there's an increasing need to have a more sophisticated stage within the microscope. In other word, a stage that would have "hands" built onto the SEM stage to allow operator to manipulate objects and execute different tasks under high magnification. In this paper we presented a compact nanomanipulation system that is designed to be retrofitted easily onto many SEMs. Capabilities and potential applications of using such manipulation system will be discussed.

Paper Details

Date Published: 14 May 2012
PDF: 8 pages
Proc. SPIE 8378, Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, 83780O (14 May 2012); doi: 10.1117/12.919683
Show Author Affiliations
P. Woo, Hitachi High-Technologies Canada, Inc. (Canada)
I. Mekuz, Hitachi High-Technologies Canada, Inc. (Canada)
B. Chen, Univ. of Toronto (Canada)


Published in SPIE Proceedings Vol. 8378:
Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy; Tim K. Maugel, Editor(s)

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