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Proceedings Paper

Silicon single-photon avalanche diodes for high-performance parallel photon timing
Author(s): Angelo Gulinatti; Ivan Rech; Corrado Cammi; Ivan Labanca; Piera Maccagnani; Massimo Ghioni
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Paper Abstract

Thanks to the steady improvement in the detectors' performance, single-photon techniques are nowadays employed in a large number of applications ranging from single molecule dynamics to astronomy. In particular, silicon Single Photon Avalanche Diodes (SPAD) play a crucial role in this field thanks to their remarkable performance in terms of Photon Detection Efficiency (PDE), temporal response and Dark Count Rate (DCR). While CMOS technology allows the fabrication of large arrays of SPAD with built-in electronics, it is only resorting to custom fabrication processes that is possible to attain detectors with high-end performance required by most demanding applications. However, the fabrication of arrays for timing applications, even with a small number of pixels, is quite challenging with custom processes owing to electrical coupling between pixels. In this paper we will discuss technological solutions for the fabrication of arrays of high-performance SPAD for parallel photon timing.

Paper Details

Date Published: 22 May 2012
PDF: 9 pages
Proc. SPIE 8375, Advanced Photon Counting Techniques VI, 83750N (22 May 2012); doi: 10.1117/12.919373
Show Author Affiliations
Angelo Gulinatti, Politecnico di Milano (Italy)
Ivan Rech, Politecnico di Milano (Italy)
Corrado Cammi, Politecnico di Milano (Italy)
Ivan Labanca, Politecnico di Milano (Italy)
Piera Maccagnani, Istituto per la Microelettronica e Microsistemi (Italy)
Massimo Ghioni, Politecnico di Milano (Italy)
Micro Photon Devices S.r.l. (Italy)


Published in SPIE Proceedings Vol. 8375:
Advanced Photon Counting Techniques VI
Mark A. Itzler, Editor(s)

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