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Proceedings Paper

Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer
Author(s): Jarkko Antila; Rami Mannila; Uula Kantojärvi; Christer Holmlund; Anna Rissanen; Ismo Näkki; Jyrki Ollila; Heikki Saari
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Paper Abstract

The trend in the development of single-point spectrometric sensors is miniaturization, cost reduction and increase of functionality and versatility. MEMS Fabry-Perot interferometers (FPI) have been proven to meet many of these requirements in the form of miniaturized spectrometer modules and tuneable light sources. Recent development of MEMS FPI devices based on ALD thin film structures potentially addresses all of these main trends. In this paper we present a device and first measurement results of a small imaging spectrometer utilizing a 1.5 mm tuneable MEMS FPI filter working in the visible range of 430-580 nm. The construction of the instrument and the properties of the tuneable filter are explained especially from imaging requirements point of view.

Paper Details

Date Published: 17 May 2012
PDF: 10 pages
Proc. SPIE 8374, Next-Generation Spectroscopic Technologies V, 83740F (17 May 2012); doi: 10.1117/12.919271
Show Author Affiliations
Jarkko Antila, VTT Technical Research Ctr. of Finland (Finland)
Rami Mannila, VTT Technical Research Ctr. of Finland (Finland)
Uula Kantojärvi, VTT Technical Research Ctr. of Finland (Finland)
Christer Holmlund, VTT Technical Research Ctr. of Finland (Finland)
Anna Rissanen, VTT Technical Research Ctr. of Finland (Finland)
Ismo Näkki, VTT Technical Research Ctr. of Finland (Finland)
Jyrki Ollila, VTT Technical Research Ctr. of Finland (Finland)
Heikki Saari, VTT Technical Research Ctr. of Finland (Finland)


Published in SPIE Proceedings Vol. 8374:
Next-Generation Spectroscopic Technologies V
Mark A. Druy; Richard A. Crocombe, Editor(s)

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