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Proceedings Paper

Chip-to-chip SnO2 nanowire network sensors for room temperature H2 detection
Author(s): A. Köck; E. Brunet; G. C. Mutinati; T. Maier; S. Steinhauer
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Paper Abstract

The employment of nanowires is a very powerful strategy to improve gas sensor performance. We demonstrate a gas sensor device, which is based on silicon chip-to-chip synthesis of ultralong tin oxide (SnO2) nanowires. The sensor device employs an interconnected SnO2 nanowire network configuration, which exhibits a huge surface-to-volume ratio and provides full access of the target gas to the nanowires. The chip-to-chip SnO2 nanowire device is able to detect a H2 concentration of only 20 ppm in synthetic air with ~ 60% relative humidity at room temperature. At an operating temperature of 300°C a concentration of 50 ppm H2 results in a sensitivity of 5%. At this elevated temperature the sensor shows a linear response in a concentration range between 10 ppm and 100 ppm H2. The SnO2-nanowire fabrication procedure based on spray pyrolysis and subsequent annealing is performed at atmospheric pressure, requires no vacuum and allows upscale of the substrate to a wafer size. 3D-integration with CMOS chips is proposed as viable way for practical realization of smart nanowire based gas sensor devices for the consumer market.

Paper Details

Date Published: 9 May 2012
PDF: 8 pages
Proc. SPIE 8366, Advanced Environmental, Chemical, and Biological Sensing Technologies IX, 83660O (9 May 2012); doi: 10.1117/12.919096
Show Author Affiliations
A. Köck, Austrian Institute of Technology (Austria)
E. Brunet, Austrian Institute of Technology (Austria)
G. C. Mutinati, Austrian Institute of Technology (Austria)
T. Maier, Austrian Institute of Technology (Austria)
S. Steinhauer, Austrian Institute of Technology (Austria)

Published in SPIE Proceedings Vol. 8366:
Advanced Environmental, Chemical, and Biological Sensing Technologies IX
Tuan Vo-Dinh; Robert A. Lieberman; Günter Gauglitz, Editor(s)

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