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Proceedings Paper

Development of microbolometer with high fill factor and high mechanical stability by shared-anchor structure
Author(s): Taehyun Kim; Kimyung Kyung; Jae Hong Park; Young Su Kim; Sung Kyu Lim; Kyungmin Kim; Kwyro Lee; C. Welham; Hee Yeoun Kim
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Paper Abstract

For the development of small microbolometer for mobile applications, new pixel design to enhance fill factor by sharedanchor structures is suggested and it can be possible to make a one anchor per unit pixel. Fill factor increases 10% more than that of normal unshared-anchor design. Amorphous-silicon based microbolometer has been fabricated with 64x64 arrays of 25um pixel size to verify proposed design. Mechanical flatness of shared-anchor structure is enhanced. Responsivity is enhanced from 1.08e+5 V/W to 1.23e+5 V/W due to the increase of fill-factor compared to unsharedanchor. There are no mechanical, electrical and thermal crosstalk problems with adjacent pixels.

Paper Details

Date Published: 31 May 2012
PDF: 7 pages
Proc. SPIE 8353, Infrared Technology and Applications XXXVIII, 83531B (31 May 2012); doi: 10.1117/12.918916
Show Author Affiliations
Taehyun Kim, National Nanofab Ctr. (Korea, Republic of)
Kimyung Kyung, National Nanofab Ctr. (Korea, Republic of)
Jae Hong Park, National Nanofab Ctr. (Korea, Republic of)
Young Su Kim, National Nanofab Ctr. (Korea, Republic of)
Sung Kyu Lim, National Nanofab Ctr. (Korea, Republic of)
Kyungmin Kim, National Nanofab Ctr. (Korea, Republic of)
Kwyro Lee, National Nanofab Ctr. (Korea, Republic of)
C. Welham, Coventor, SARL (France)
Hee Yeoun Kim, National Nanofab Ctr. (Korea, Republic of)


Published in SPIE Proceedings Vol. 8353:
Infrared Technology and Applications XXXVIII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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