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Proceedings Paper

CMOS compatible silicon-based Mach-Zehnder optical modulators with improved extinction ratio
Author(s): Zhiyong Li; Liang Zhou; Yingtao Hu; Xi Xiao; Yude Yu; Jinzhong Yu
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Paper Abstract

Improved Extinction Ratio of 25 dB was demonstrated in silicon based optical modulators on CMOS platform in China. The measurement results agree with the simulation, followed by a discussion about the effects of both propagation loss in Mach-Zehnder arms and power ratio at beam splitters and combiners. The analyses indicate that many considerations have to be taken into design and development of the compatible fabrication of these integrated silicon photonics, especially for the improved extinction ratio of optical modulators. In this summary, we propose the integrated optical modulators in SOI by use of the compatible CMOS processes under the modern CMOS foundry in Chinese homeland. And the measured results were shown, the fast response modulator with the data transmission rate of 10 Gbps.

Paper Details

Date Published: 22 February 2012
PDF: 6 pages
Proc. SPIE 8333, Photonics and Optoelectronics Meetings (POEM) 2011: Optoelectronic Devices and Integration, 833305 (22 February 2012); doi: 10.1117/12.918869
Show Author Affiliations
Zhiyong Li, Institute of Semiconductors (China)
Liang Zhou, Institute of Semiconductors (China)
Yingtao Hu, Institute of Semiconductors (China)
Xi Xiao, Institute of Semiconductors (China)
Yude Yu, Institute of Semiconductors (China)
Jinzhong Yu, Institute of Semiconductors (China)


Published in SPIE Proceedings Vol. 8333:
Photonics and Optoelectronics Meetings (POEM) 2011: Optoelectronic Devices and Integration
Erich Kasper; Jinzhong Yu; Xun Li; Xinliang Zhang; Jinsong Xia; Junhao Chu; Zhijiang Dong; Bin Hu; Yan Shen, Editor(s)

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