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Proceedings Paper

A self-calibrating temperature independent model of a bi-axial piezoelectric MEMS tilt sensor
Author(s): Paul M. Moubarak; Danielle A. Barsky; Pinhas Ben-Tzvi; Mona Zaghloul
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Paper Abstract

The dual-axis piezoelectric tilt measurement device presented in this paper is modeled using a proposed methodology that generates a self-calibrating representation of the sensor's output around two axes. Typically, when a piezo-based sensor is developed, its output is modeled as a direct function of its geometric, electro-mechanical and piezoelectric properties. This means that an accurate representation of the sensor's output requires an accurate knowledge of its characteristics. In piezoelectric MEMS applications however, such information is either not available, or is provided in the form of approximate values which are susceptible to external stimuli. The method proposed in this paper models the direct piezoelectric effect as a function of genetic data provided a priori about the operation of a piezo-system. The resulting model is shown to be independent of any system-specific characteristics or any external stimuli. The impact that these parameters exhibit on the output of the sensor is carried implicitly by the genetic data which is generated through calibration. The validity of the proposed model is demonstrated through simulations performed on a new piezoelectric device for dual-axis tilt measurement. These results show a considerable accuracy under variations in the operating conditions, such as temperature.

Paper Details

Date Published: 7 May 2012
PDF: 7 pages
Proc. SPIE 8373, Micro- and Nanotechnology Sensors, Systems, and Applications IV, 83732L (7 May 2012); doi: 10.1117/12.918419
Show Author Affiliations
Paul M. Moubarak, The George Washington Univ. (United States)
Danielle A. Barsky, The George Washington Univ. (United States)
Pinhas Ben-Tzvi, The George Washington Univ. (United States)
Mona Zaghloul, The George Washington Univ. (United States)


Published in SPIE Proceedings Vol. 8373:
Micro- and Nanotechnology Sensors, Systems, and Applications IV
Thomas George; M. Saif Islam; Achyut Dutta, Editor(s)

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