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Proceedings Paper

Nanoparticle size and shape evaluation using the TSOM method
Author(s): Bradley Damazo; Ravikiran Attota; Purushotham Kavuri; András E. Vladár
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Paper Abstract

A novel through-focus scanning optical microscopy (TSOM) method that yields nanoscale information from optical images obtained at multiple focal planes will be used here for nanoparticle dimensional analysis. The TSOM method can distinguish not only size differences but also shape differences among nanoparticles. Size evaluation based on simulations will be presented along with experimental data for nanoparticles and nanodots with sizes below 100 nm. Size determination using an experimentally created library will also be presented.

Paper Details

Date Published: 5 April 2012
PDF: 6 pages
Proc. SPIE 8324, Metrology, Inspection, and Process Control for Microlithography XXVI, 832436 (5 April 2012); doi: 10.1117/12.918263
Show Author Affiliations
Bradley Damazo, NIST (United States)
Ravikiran Attota, NIST (United States)
Purushotham Kavuri, NIST (United States)
András E. Vladár, NIST (United States)

Published in SPIE Proceedings Vol. 8324:
Metrology, Inspection, and Process Control for Microlithography XXVI
Alexander Starikov, Editor(s)

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