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Proceedings Paper

Studies of the super-smooth mirror roughness by grazing incidence x-ray scattering method
Author(s): Wei-Tao Du; Jie Wang
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Paper Abstract

The surface roughness of a large-size super-smooth mirror is studied by grazing incidence X-ray scattering method (GIXRS). We derive the two-dimensional theoretical model based on Tong's result in 1993; In light of our formulae, the power spectrum density (PSD) of a mirror surface can be correlated to the intensity distribution of X-ray scattering. A 210mm-long mirror is measured at the beamline 16B at Shanghai Synchrotron Radiation Facility (SSRF) and the data is analyzed. The result indicates that the root mean square (RMS) of the surface roughness calculated by our formulae is in good agreement with that measured by a white-light 3D profiler.

Paper Details

Date Published: 29 November 2011
PDF: 8 pages
Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 82020F (29 November 2011); doi: 10.1117/12.917959
Show Author Affiliations
Wei-Tao Du, Shanghai Institute of Applied Physics (China)
Jie Wang, Shanghai Institute of Applied Physics (China)


Published in SPIE Proceedings Vol. 8202:
2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology
Hoi Sing Kwok; Yanbing Hou; Jinxue Wang; Boyu Ding; Liquan Dong; Fengzhou Fang; Albert A. Weckenmann; Ji Zhao; Peter Zeppenfeld; Jack K. Luo; Boyu Ding; Liquan Dong; Jinxue Wang; Lian Xiang Yang; Chongxiu Yu; Jinxue Wang; Boyu Ding; Liquan Dong, Editor(s)

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